Concept information
Preferred term
micro-electromechanical device
Synonym(s)
- microelectromechanical device
Belongs to group
In other languages
-
French
-
dispositif microélectromécanique
-
microsystème électromécanique
-
Spanish
URI
http://data.loterre.fr/ark:/67375/RDR-SJRGH86B-6
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