Concept information
Preferred term
litografía por haz de electrones
Synonym(s)
- litografía por haz electrónico
Belongs to group
- Design (en)
In other languages
-
English
-
French
-
lithographie par faisceau électronique
URI
http://data.loterre.fr/ark:/67375/NHT-M1BHXL9M-4
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