Concept information
Preferred term
photolithography
Broader concept(s)
Narrower concept(s)
Synonym(s)
- optical lithography
- photolithographic process
In other languages
-
French
-
lithographie optique
-
masquage optique
-
masquage photographique
-
photomasquage
-
German
-
Photolithographie
-
Spanish
-
litografía óptica
URI
http://data.loterre.fr/ark:/67375/FMC-LJL82CDG-L
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